STARC has been carrying out design and manufacturing of MEMS products for nearly 10 years. The design activities at STARC involve design of Micro Electro Mechanical Systems (MEMS) sensors targeting the process guidelines established at STARC foundry. Design starts with specification analysis and feasibility studies in discussion with teams from semiconductor fabrication, assembly and packaging and system integration. Design of piezo-resistive MEMS pressure sensor has been first device successfully implemented at STARC by demonstrating the proof of concept and bringing up to prototype level.
Piezo-Resistive MEMS pressure sensors of different ranges from 10 bar to 400 bar have been successfully fabricated using the silicon fabrication technologies developed indigenously at STARC. The fabricated sensor dies have been encapsulated in suitable SS 316L housings integrated with electronics to form a complete MEMS pressure transducer. The pressure transducers have necessary protection circuitry for protecting the system from electromagnetic interferences. Custom package designs with signal conditioning electronics have been implemented.
Piezo-resistive MEMS pressure transducers are regularly supplied to customers in batches of hundreds. The pressure transducers are found to perform satisfactorily in users system and performance of the pressure transducers is found to be on par with imported sensors.
STARC (SITAR) is also actively collaborating with MEMS design centres / educational institutes / Research and Development organizations for manufacturing multiple sensors. Mask designs are carried out by populating customer’s design layout as per STARC’s process guidelines to ensure hassle free fabrication of MEMS devices.
STARC has offered its foundry services for fabricating customer’s designs. MEMS devices successfully fabricated at STARC MEMS foundry in collaboration with other agencies are listed below.
MEMS:
VLSI:
